unit processes: diffusion, implantation, film growth, deposition,
etching
common/modern CMOS process and fabrication flows
MEMS release processes
Principles of Micro Sensors and Transducers:
optical sensors
thermal sensors
pressure sensors
electrostatic transducers
thermal transducers
Photonics:
Fundamentals of Optics: Geometrical optics and matrix methods; Wave
optics, superposition, and interference; Gaussian beam optics and
lasers; Polarization; Photons and photons in semiconductors.
Semiconductor lasers, LEDs, and photodetectors
Passive waveguide devices: Optical waveguide structures; Modes in
optical waveguides; Waveguide coupling; Modulators and Switches.