Skip to main content

Micromachined Faraday Cup Array Using Deep Reactive Ion Etching

Micromachined Faraday Cup Array Using Deep Reactive Ion EtchingDeveloped a micromachined Faraday cup array (MFCA) for position sensitive ion detection using a deep reactive ion etching (DRIE) process. Linear, closely spaced arrays of 64, 128 and 256 cups have been produced with pitches of 250 _m and 150 _m. The advanced inspective tools, such as SEM and AFM, have been used to characterize the devices.