| Course name | Fundamentals of Integrated Circuit Technology |
| Course number | EE486 Cross listings: MSE467 |
| Credit Hours | 4 |
| Quarter Offered | ___ |
| Frequency | ___ |
| Prerequisites | Required: EE482 for EE, ___ for MSE Recommended: |
| Course Description | Processing physics, chemistry, and technology, including evaporation, sputtering, epitaxial growth, diffusion, ion implantation, laser annealing, oxidation, chemical vapor deposition, photoresists. Design considerations for bipolar and MOS devices, material and process characterization. Future trends. |
| Laboratory | ___ |
| Keywords | ICs, integrated circuits, fabrication, processing, chips, silicon |
| Web Page | |
| Contact | Name: Martin Afromowitz Department: Electrical Engineering email: afro@ee.washington.edu |
This course is part of the curriculum in Applied Microtechnology at the University of Washington.