| Course name | Introduction to Microelectromechanical Systems (MEMS) |
| Course number | EE502 Cross listings: ME504, others pending |
| Credit Hours | 4 |
| Quarter Offered | Autumn |
| Frequency | Annually |
| Prerequisites | Required: none Recommended: EE527 |
| Course Description | MEMS (MicroElectroMechanical Systems) build on the existing
silicon processing infrastructure to create micron-scale
machines. Unlike conventional integrated circuits, MEMS can have many
functions, including sensing, actuation, and communication. This
course introduces key topics such as MEMS micromachining techniques,
mechanical and electrical design and layout, and discusses specific
application examples. (This course was initially taught as EE539 - Special Topics in EE.) |
| Laboratory | CAD laboratory assignments, one 4 hour cleanroom session. |
| Keywords | MEMS, microfabrication, microsensors, microactuators, transducers. |
| Web Page | www.ee.washington.edu/class/502 |
| Contact | Name: Prof. Karl Böhringer Department: Electrical Engineering email: karl@ee.washington.edu |
This course is part of the curriculum in Applied Microtechnology at the University of Washington.