|Course name||Microfabrication Techniques|
Cross listings: none
|Course Description||Principles and laboratory techniques used in solid-state electronics research. Basic familiarity with practices and equipment used on-campus. Laboratory safety; materials handling, storage and disposal; clean room use; photoresist characteristics; mounting, bonding, and probing; wet chemical etching; vacuum evaporation; patterning of metal films using photoresist. Extensive laboratory with limited enrollment. Prerequisite: graduate standing or permission of instructor.|
|Laboratory||Weekly extensive laboratory session.|
|Keywords||Microfabrication, lithography, surface micromachining, bulk micromachining, laboratory safety, VLSI, MEMS|
|Contact||Name: Karl F. Böhringer
Department: Electrical Engineering
This course is part of the curriculum in Applied Microtechnology at the University of Washington.