| Course name | Microfabrication Techniques |
| Course number | EE527 Cross listings: none |
| Credit Hours | 4 |
| Quarter Offered | Spring |
| Frequency | Annually |
| Prerequisites | Required: - Recommended: - |
| Course Description | Principles and laboratory techniques used in solid-state electronics research. Basic familiarity with practices and equipment used on-campus. Laboratory safety; materials handling, storage and disposal; clean room use; photoresist characteristics; mounting, bonding, and probing; wet chemical etching; vacuum evaporation; patterning of metal films using photoresist. Extensive laboratory with limited enrollment. Prerequisite: graduate standing or permission of instructor. |
| Laboratory | Weekly extensive laboratory session. |
| Keywords | Microfabrication, lithography, surface micromachining, bulk micromachining, laboratory safety, VLSI, MEMS |
| Web Page | www.ee.washington.edu/class/527 |
| Contact | Name: Karl F. Böhringer Department: Electrical Engineering email: karl@ee.washington.edu |
This course is part of the curriculum in Applied Microtechnology at the University of Washington.