|Course name||Making Sensors on Silicon|
Cross listings: none
|Frequency||every odd year|
|Course Description||Significant advances have been made in the past decade in capabilities for making sensors using conventional and modified silicon microfabrication processes. This course will address major classes of sensors (thermal, radiation, mechanical, acoustic, chemical) within the context of integrating them onto silicon substrates for improved sensitivity, accuracy and other benefits.|
|Keywords||silicon, sensors, microfabrication, integration|
|Contact||Name: Denise Wilson
Department: Electrical Engineering
This course is part of the curriculum in Applied Microtechnology at the University of Washington.