The Electrical Engineering Microfabrication Laboratory (EEMF lab) at
the University of Washington is a resource for the local
microtechnology community. It consists of a suite of cleanroom
laboratories that includes a variety of microfabrication equipment and services, such
as lithography, thin film deposition and characterization, as well as
wet and dry etching and scanning electron microscopy.
Since Autumn 2001, the EEMF laboratory is operated as a University of
Washington cost center. It is available to all members of the
University of Washington, as well to as users from industry. To obtain
access please contact the lab
management.
The laboratory is located in the lower basement of the new EE/CSE
building. Access is via the gowning room B025.
| Personnel | |
|---|---|
| Director: | Prof. Karl F. Böhringer, Prof. R. Bruce Darling, Prof. Scott Dunham |
| Manager: | Dr. Tai C. Chen, Sarah McQuaide |
| Technical Support: | Greg Golden |
| Administrative Support: | Phebe Burgos, Cymbal Irwin |
Back to Center for Applied Microtechnology mailto:smcquaid@u.washington.edu