Department of Electrical Engineering, University of Washington

The following sites contain information about MEMS-related research at the university level.

Berlin Technical University Microsensor & Actuator Technology (MAT) Center, Berlin Boston University - Precision Engineering Research Laboratory
Brigham Young University - Integrated Microelectronics Laboratory
California Institute of Technology - Engineering Design Research Laboratory
Carnegie Mellon University - Microelectromechanical Systems Laboratory
Case Western Reserve University - Microelectromechanical Systems
Cornell University - MacDonald's Research Group
Dartmouth College - Microengineering Cleanroom Laboratory
Georgia Institute of Technology - Micromachining Research
Louisiana Tech University - Institute for Micromanufacturing (IfM)
Massachusetts Institute of Technology - MicroSystems Technology Laboratory
New Jersey Institute of Technology - MEMS Project
North Carolina State University at Raleigh - Electronics Research Lab
Northeastern University - Microfabrication Laboratory
Stanford University - Transducers Group
University of California at Berkeley - Berkeley Sensor & Actuator Center (BSAC)
University of California at Davis - Microfabrication Facility
University of California at Irvine - External Development
University of California at Los Angeles - UCLA MEMS
University of Cincinnati - Center for Microelectronic Sensors and MEMS (CMSM)
University of Hawaii at Manoa - MEMS
University of Illinois at Chicago - Microfabrication Lab
University of Michigan-Electrical Engineering and Computer Science
University of Minnesota - MEMS Program
University of Missouri at Rolla- Piezoelectric Motor Research
University of Southern California, Information Sciences Institute - The MOSIS Project
University of Texas at Austin - MicroElectromagnetic Device Group
University of Wisconsin at Madison - UW-MEMS
West Virginia Univeristy - Microelectronic Systems Research Center
Simon Fraser University, Canada - Institute of Micromachine and Microfabrication Research
Technical University of Nova Scotia, Canada - MEMS Laboratory
University of Alberta, Canada - Alberta Microelectronic Center (AMC)
Delft University, Netherlands - Delft Institue of Microelectronics and Submicron Technology (DIMES)
Delft University, Netherlands - Silicon Microoptics
IMT-DMT-EPFL, Swiss - Microsystems Group
Lancaster University, UK - Microelectronics and Microsystems
University of Mainz, Germany - IMM Institute of Microtechnology
University of Sheffield, UK - MEMS Unit
University of Surrey, UK - D. Banks MEMS Research
University of Twente, Netherlands - Micromechanical Transducers Group (MicMec)
KAIST, Korea - Micromachines & Microsystems Laboratory
Soeul National University, Korea - Micro Sensors and Actuators Lab
University of Tokyo, Japan - Center for Engineering
University of Tokyo, Japan - Department of Mechano-Informatics