Department of Electrical Engineering, University of Washington

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The CAM Process Tutorial pages provides links to Adobe pdf files that cover EE 527 course work. They provide an overview that accompanies the lecture series in Electrical Engineering on the process of microfabrication.

Flammability of Compounds

Toxicity of Materials

Chemical Storage and Labeling

Properties of Specific Chemicals

De-Ionized Water

Clean Rooms

Photolithography

Exposure and Imaging

Negative Photoresists

Positive Photoresists

Vacuum Systems

Physical Vapor Deposiiton

Wet Etching

 

Glossary of MEMS terms