Standard Operating Procedure
Summary
Equipment
CVC Vacuum Evaporation System
Picture
Specification
Vacuum chamber system for use in thermal evaporation of metal. Rotary vane roughing pump used in conjunction with a high vacuum diffusion pump to achieve pressures as low as 2x10-6 Torr.
Location
EE/CSE B029, EE MicroFabrication Laboratory (EE-MFL), UoW
Contact
Access
Prof. Bruce Darling, Dept. of Electrical Engineering (206-543-4703, bdarling@ee.washington.edu).
Technical
Mr. Kevin Kerkof, EE-MFL (206-616-6981, kkerkof@u.washington.edu).
Emergency
Mr. Kevin Kerkof, EE-MFL (206-616-6981, kkerkof@u.washington.edu).
This Document
Date
Rev.
Authors
1999-06-07
0
Mike Goettemoeller, Chris Morris, Shane Rowell