Department of Electrical Engineering, University of Washington

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Standard Operating Procedures for Cleanroom Equipment

 

Photolithography  
   
Buffered Oxide Etch
BOE.pdf

BOEData. pdf

   
Evaporation SOP

Quicklist

   
Scanning Electron Microscope  
   
Split Field Microscope  
   
Oriel Timer-integrator  
   
Spin Coating Photoresist  
   
Oxidation  
   
Sputtering  
   
Spin-on glass  
   
Thickness Probe System  
   
Vacuum Oven  
   
Glassware washing