Department of Electrical Engineering, University of Washington
| Standard
Operating Procedures for Cleanroom Equipment
|
||
| Photolithography | ||
| Buffered Oxide Etch |
|
|
| Evaporation | SOP | |
| Scanning Electron Microscope | ||
| Split Field Microscope | ||
| Oriel Timer-integrator | ||
| Spin Coating Photoresist | ||
| Oxidation | ||
| Sputtering | ||
| Spin-on glass | ||
| Thickness Probe System | ||
| Vacuum Oven | ||
| Glassware washing | ||