EE MICROFABRICATION LAB FACILITIES PAGE

Department of Electrical Engineering, University of Washington

Equipment and Facilities

The EE Microfabrication Lab is a resource for the University electrical engineering community. The Equipment and Facilities page of the EE Microfabrication Lab lists the equipment and facilities available to researchers, graduate students, and faculty at the University of Washington.

Aligner, 3-inch	Gowning Room	Safety Equipment
Aligner, 4-inch	MOS Wet Bench	Spill Kits
Chemical Prep Bench	Non-MOS Wet Bench	Surface Profilometer
DI Water Plant	Photolithography Bench	Tube Furnace, 2-inch
Dielectric Sputter System	Photolithography Room	Tube Furnace, 6-inch
Dry Boxes	Photoresist Bake Oven	Ultrapure Water Polisher
Electroplating Bench	Photoresist Spin Coater	Utility Drops
Furnace stack	Resistance Evaporator