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This facility supplies ultra-high purity deionized water to the lower basement laboratories in the EE/CSE building. |
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The system delivers water with particulates filtered out to 0.2 microns, resistivity of greater than 18 meg-ohm-cm, and total organic carbon (TOC) of less than 50 ppb. The water is delivered to the basement laboratory taps by way of two recirculation loops, each of which contains 9 taps. |
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Operational |
EE/CSE B036; EE MFL Facilities Room |
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