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This room is yellow-lighted to prevent exposure of photoresist coated wafers. It contains all of the photoresist dispense, spin, bake, exposure, and development equipment. It is a class-1000 clean room and is the highest level of cleanliness in the clean room suite. |
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In addition to the primary photolithography equipment, the room also has a Barnstead Easypure RF deionized water polisher and an Ohaus Dial-O-Gram pan balance. Thornton 200CR deionized water monitors are located beside each point of use and give continuous readings of resistivity and temperature. |
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Operational |
EE/CSE B017; EE MFL Photolithography Room |
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