Photolithography Room

This room is yellow-lighted to prevent exposure of photoresist coated wafers. It contains all of the photoresist dispense, spin, bake, exposure, and development equipment. It is a class-1000 clean room and is the highest level of cleanliness in the clean room suite.

SPECIFICATIONS
MATERIALS

In addition to the primary photolithography equipment, the room also has a Barnstead Easypure RF deionized water polisher and an Ohaus Dial-O-Gram pan balance. Thornton 200CR deionized water monitors are located beside each point of use and give continuous readings of resistivity and temperature.

STATUS
LOCATION
ACCESS CONTACT
TECHNICAL CONTACT

Operational

EE/CSE B017; EE MFL Photolithography Room

R. B. Darling
R. B. Darling