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This machine measures surface profiles by means of scanning a mechanical stylus across the sample. The small motions of the stylus are amplified and recorded on chart paper by a linear, variable differential transducer (LVDT). |
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Can resolve step heights up to 200 um. |
Only materials and substrates which are dry and not oily. Specimens must not leave any residue behind on stylus. |
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Operational |
EE/CSE B023; EE MFL Clean Room |
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