Surface Profilometer

Tencor AS100 Profiler

This machine measures surface profiles by means of scanning a mechanical stylus across the sample. The small motions of the stylus are amplified and recorded on chart paper by a linear, variable differential transducer (LVDT).

SPECIFICATIONS
MATERIALS

Can resolve step heights up to 200 um.

Only materials and substrates which are dry and not oily. Specimens must not leave any residue behind on stylus.

STATUS
LOCATION
ACCESS CONTACT
TECHNICAL CONTACT

Operational

EE/CSE B023; EE MFL Clean Room

R. B. Darling
R. B. Darling