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This is a deionized water polisher that provides a final level of purification on the in-house DI water system before it is used on the MOS-grade wet benches. |
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Output product DI water is better than 18 meg-ohm-cm resistivity and less than 50 ppb in total organic carbon (TOC). |
This system accepts only the in-house DI water as feedstock. The DI water it produces is suitable for all MOS processing needs. |
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Operational |
EE/CSE B023A; EE MFL Wet Etching Room |
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