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This facility provides quick and compact utility connections to equipment in the clean room and processing room of the EE MicroFabrication Laboratory. This allows new equipment to be installed and refitted with a minimum of cost, labor, and laboratory disruption. |
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Utilities on each drop include: rough vacuum pump exhaust, rough vacuum pump intake, laboratory compressed air (80 psig), laboratory vacuum, process chilled water (40 F, 15 dpsi), and electric power. |
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Operational |
EE/CSE B023 and B029; EE MFL Clean Room and Process Room |
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