Department of Electrical Engineering, University of Washington

The Silvaco TCAD tools have been installed in the MEMS Computing Lab
(B20A) .  They are available from any NT machine on the EE domain, so
you can try them out from your office.  Below are directions on
getting started which you can pass on to your students.

1) Select "Internet Neighborhood" or "Network Neighborhood"

2) Double click on "Bdcjk"

3) Single click on "Silvaco," use file menu to put a shortcut to this folder 
on your desktop (say yes in window that pops up).

4) There are 6 folders under Silvaco. 

  bin: executables, the GUI is Deckbuild, the Plot software is Tonyplot
  Doc: full online documentation in pdf format under Tcad99Q4
  etc: empty
  examples: examples input files which can be selected and run directly
  lib: libraries
  work: working directory, this should be changed by users to their own  
        workspace by using the Edit/Preferences pull-down menu in Deckbuild

Note that there are 3 main simulation packages. ATHENA is for process 
simulation and includes SUPREM4 as well as software for deposition and etching 
and photolithography modeling. ATLAS is for device modeling and contains 
PISCES as well further modules. SUPREM3 is an old 1D process simulator.

The easiest way to start is to use Deckbuild. The examples menu can be used to 
run examples of choice. Once loaded, the green arrow starts things running. 
The examples can be edited as desired and then saved to users workspace. Once 
an example or two are run (the plots labeled Tonyplot need to be opened from 
taskbar), the manual should be read to understand how to proceed further. The 
manuals have short tutorials to get people started followed by more in depth 
descriptions.