|Course name||Fundamentals of Integrated Circuit Technology|
Cross listings: MSE467
|Prerequisites||Required: EE482 for EE, ___ for MSE
|Course Description||Processing physics, chemistry, and technology, including evaporation, sputtering, epitaxial growth, diffusion, ion implantation, laser annealing, oxidation, chemical vapor deposition, photoresists. Design considerations for bipolar and MOS devices, material and process characterization. Future trends.|
|Keywords||ICs, integrated circuits, fabrication, processing, chips, silicon|
|Contact||Name: Martin Afromowitz
Department: Electrical Engineering
This course is part of the curriculum in Applied Microtechnology at the University of Washington.