Photoresist Bake Oven

Blue-M Model SW-11TA

This convection oven is used for prebaking photoresist to drive off the coating solvent. It typically operates at 90 C.

SPECIFICATIONS
MATERIALS

Only positive photoresist coated substrates are allowed.

STATUS
LOCATION
ACCESS CONTACT
TECHNICAL CONTACT

Operational

EE/CSE B017; EE MFL Photolithography Room

R. B. Darling
R. B. Darling