Tube Furnace, 6-Inch

Themco Model Mini-Brute MB-80

This is a 6-inch diameter quartz tube furnace designed for heat treating substrates that do not significantly outgas or decompose. It is used mainly for annealing, sintering, alloying, firing substrates of up to 4-inch diameter.

SPECIFICATIONS
MATERIALS

8000 Watt furnace. Three zone (6", 12", 6") heating elements, independently controllable up to 1200 C. K-type thermocouple instrumentation.

Allowable substrates are Si, GaAs, Al2O3, SiC, SiO2, and InP. Substrates may contain various metallizations.

STATUS
LOCATION
ACCESS CONTACT
TECHNICAL CONTACT

Operational

EE/CSE B029; EE MFL Processing Room

R. B. Darling
R. B. Darling