Ultrapure Water Polisher

Bamstead Model Nonopure Infinity

This is a deionized water polisher that provides a final level of purification on the in-house DI water system before it is used on the MOS-grade wet benches.

SPECIFICATIONS
MATERIALS

Output product DI water is better than 18 meg-ohm-cm resistivity and less than 50 ppb in total organic carbon (TOC).

This system accepts only the in-house DI water as feedstock. The DI water it produces is suitable for all MOS processing needs.

STATUS
LOCATION
ACCESS CONTACT
TECHNICAL CONTACT

Operational

EE/CSE B023A; EE MFL Wet Etching Room

R. B. Darling
R. B. Darling