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NELT-integrated MEMS for High-accuracy Mass Sensing

Lin_NELT-integrated-MEMS-for-high-accuracy-mass-sensingIn this project, photonic crystal optical tweezers and microfluidic structures are integrated with MEMS resonators. By precisely trapping and positioning the particles on the surface of the MEMS resonators, the mass of the particles can be measured and monitored with high accuracy and repeatability. The technology can be used for living cells and nanoparticles, for example, understanding how cell mass change under various cemo-mechanical stimuli and monitoring nanoparticle growth in nanofabrications.